Overview of Biosensors and Photolithography Techniques

BioMEMS

Micro-electromechanical systems for biological applications.

Cantilever

A beam anchored at one end, used in sensors.

Resonant sensor

Detects mass changes via frequency shifts.

Piezoelectric multimorph

Material generating voltage under mechanical stress.

Mass spring model

Simplified model for oscillatory motion in sensors.

Q factor

Quality factor indicating energy loss in oscillators.

Single molecule detection

Identifying individual molecules in a sample.

Personnel contamination

Unwanted introduction of foreign particles by humans.

Bunny suit

Protective clothing worn in cleanrooms.

Entrance air shower

Air curtain to minimize contamination during entry.

Permissible materials

Approved substances for use in cleanroom environments.

Yellow light lithography

Photolithography technique using yellow light wavelengths.

Photomask

Template used to project patterns onto substrates.

Positive tone vs. negative tone

Types of photoresist based on exposure response.

DUV

Deep ultraviolet light used in photolithography.

Photolithography recipe

Step-by-step process for creating micro-patterns.

Photoresist spinning

Technique to evenly coat substrates with photoresist.

Soft-baking

Process to remove solvent and harden photoresist.

PDMS soft-lithography

Method for creating 3D patterns using PDMS.

Bonding to glass

Joining materials for structural integrity and function.

Si-O bonding

Silicon-oxygen bond crucial for glass bonding.

Thermal annealing

Heating process to enhance material bonding.