Process Gas Systems Design and Installation Specifications

Applied Materials Document Number: Gas 242

ANSI/CGA G4.1-2018

Cleaning of Equipment for Oxygen Service

ANSI/CGA G-13-2016

Storage and Handling of Silane and Silane Mixtures

ASME B16.22-2018

Wrought Copper and Copper Alloy Solder Joint Pressure Fittings

ASME B31.1-2020

Power Piping

ASME B31.3-2020

Process Piping

ASME B31.9-2020

Building Services Piping

ASME B46.1-2019

Surface Texture

ASTM A262-15(2021)

Intergranular Corrosion Testing Method

ASTM A269/A269M - 15a (2019)

Seamless and Welded Austenitic Stainless-Steel Tubing for General Service

ASTM A276/A276M-17

Stainless Steel Bars and Shapes

ASTM A312/A312M-21

Stainless-Steel Pipe Specification

ASTM A370-21

Standard Methods and Definitions for Mechanical Testing of Steel Product

ASTM A450/A450M-21

General Requirements for Carbon, and low Alloy Steel Tubes

ASTM A480/A480M-20a

General Requirements for Flat Rolled Stainless and Heat Resisting Steel Plate, Sheet, and Strip

ASTM A632-19

Seamless and Welded Austenitic Stainless-Steel Tubing (Small-Diameter) for General Service

ASTM A700-14(2019)

Standard Guide for Packaging, Marking, and Loading Methods for Steel Products for Shipment

ASTM A751-21

Methods, Practices and Terminology for Chemical Analysis of Steel Products

ASTM A967/A967M-17

Standard Specification for Chemical Passivation Treatments for Stainless Steel Parts

ASTM B32-20

Specification for Solder Metal

ASTM B68/B68M-19

Specification for Seamless Copper Tube, Bright Annealed

ASTM B75/B75M-20

Specification for Seamless Copper Tube

ASTM B88-20

Specification for Seamless Copper Water Tube

ASTM B280-20

Specification for Seamless Copper Tube for Air Conditioning and Refrigeration Field Service

ASTM B622-17b

Standard Specification for Seamless Nickel and Nickel-Cobalt Alloy Pipe and Tube

ASTM B828-16

Standard Practice for Making Capillary Joints by Soldering of Copper and Copper Alloy Tube and Fittings

ASTM E8/E8M-21

Test Methods for tension Testing of Metallic Materials

ASTM E55-11(2017)

Practice for Sampling Wrought Nonferrous Metals and Alloys for Determination of Chemical Composition

ASTM E92-17

Test Methods for Vickers Hardness and Knoop Hardness of Metallic Materials

ASTM E112-13(2021)

Methods for Determining Average Grain Size

ASTM E165/E165M-18

Practice for Liquid Penetrant Testing for General Industry

ASTM E213-22

Practice for Ultrasonic Testing

ASTM E273-20

Practice for Ultrasonic Testing of the Weld Zone of Welded Pipe and Tubing

ASTM E309-16

Practice for Eddy-Current Examinatino of Steel Tubular Products Using Magnetic Saturation

ASTM E354-21e1

Test Methods for Chemical Analysis of High-Temperature, Electrical, Magnetic and Other Similar Iron, Nickel, and Cobalt Alloys

ASTM E426-16(2021)

Practice for Electro-magnetic (Eddy-current) Testing of Seamless and Welded Tubular Products, Austenitic Stainless Steels and Similar Alloys

ASTM E493/E493M-11(2017)

Standard Practice for Leaks Using the Mass Spectrometer Leak Dectector in the Inside Out Testing Mode

ASTM E498/E498M-11(2017)

Standard Practice for Leaks Using the Mass Spectrometer Leak Detector or Residual Gas Analyzer in the Trace Probe Mode

ASTM E499/E499M-11(2017)

Standard Practice for Leaks Using the Mass Spectrometer Leak Detector in the Detector Probe Mode

ASTM E570-20

Practice for Flux Leakage Examination of Ferro-magnetic Steel Tubular Products

ASTM E1806-18

Standard Practice for sampling Steel and Iron for Determinatino of Chemical Composition

ASTM F1396-93(2020)

Standard Test Method For Determination of Oxygen Contribution by Gas Distribution System Components

ASTM F1397-93(2020)

Standard Test Method for Determination of Moisture Contribution by Gas Distribution System Components

ASTM G93/G93M-19

Standard Guide for Cleanliness Levels and Cleaning Methods for Materials and Equipment Used in Oxygen-Encriched

ASTM G150-18

Standard Test Method for Electrochemical Critial Pitting Temperature Testing of Stainless Steel and Related Alloys

SEMI F1

Specification for Leak Integrity of High Purity Gas Piping Systems and Components (Previously F16)

SEMI F19

Specificatino for the Surface Condition of the Wetted Surfaces of Stainless-Steel Components

SEMI F20

Specificatino for 316L Stainless Steel bar, Forings, Extruded Shapes, Plate, and Tubing for Components Used in General Purpose, High Purity, and Ultra-High Purity Semiconductor Manufacturing Applications

SEMI F70

Test Method for Determination of Particle contribution of gas delivery systems

µ

micron

3rd Party QA/QC

3rd Party QA/QC (Previously AQAE, Applied Quality Assurance Representative)

AHJ

Authority Having Jurisdiction

AISC

American Institute of Steel Construction

AISI

American Iron and Steel Institute

AM&M

Alternate Means & Methods

ANSI

American National Standrads Institute

Ar

Argon

ASME

American Society of Mechanical Engineers

ASTM

American Society for Testing and Materials

ATW

Automatic Tube Weld (not approved for welding)

AWS

American Welding Society

CAC

California Administrative Code

CDA

Compressed Dry Air

CFM

Cubic Feet per Minute

CFR

Code of Federal Regulations

CGA

Compressed Gas Association

CNC

Condensation Nucleus Counter

COAX

Coaxial

COI

Chemicals of Interest

DI

Deionized (water)

DOT

Department of Transportation

EMO

Emergency Machine Off

EPA

Enviromental Protection Agency

EPO

Emergency Power Off (sysnonymous with EMO)

FM

Factory Mutual

FPM

Feet Per Minute

GC

Gas Cabinet

GCS

Gas Chemical Systems Owner - Manager

GTAW

Gas Tungsten Arc Welding

He

Helium

HEPA

High Efficiency Particulate Air (filter classification)

HN2

House Nitrogen

HPM

Hazardous Production Material

IPA

Isopropyl Alcohol

LL

Load Lock

MFC

Mass Flow Controller

MGE

Mini Gas Enclosure

MIB

Main Isolation Box

MIL-STD

Military Standard

MQA

Mechanical Contractor Quality Assurance Representative

N2

Nitrogen

NEC

National Electric Code

NESC

National Electric Safety Code

NFPA

National Fire Prevention Agency

O2

Oxygen

OSHA

Occupational Safety and Health Administration

OVB

Overhead Valve Box

PCTFE

Polychlorotriflouroethylene

PE

Polyethylene

PFA

Perflouroalkoxy

POU

Point-Of-Use