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status quo
Abbe errors
non-linear force sensor
non-symmetric design
poot component quality
not student proof
parasitic motions
not vacuum ready
force sensor elongation not measured
unstable sample length adjustment
quantative error analysis
error motions moving stage: parasitic motion and misalignment (y and Rz)
deformations due to force applications: significatn difference between present and measured deformation in x direction
deformation of force sensor: significant misalignment and parasitic motions
introduces measurement uncertainty and sample disturbace

force sensor
stiffness based sensor, measruing the displacement
linear and vacuum ready, works only in the x directions
constrained in 5 DOF
strain application
parallel leaf spring motion stages, movieng over center position

loadcell design
parallel leaf spring design
position and stiffness based force measurements
protective end stops
FEM design


strain application system
Preloaded coil sping drives the leaf spring to apply strain. Since the spindle works only in on directions, the spring takes care of the other one

Gearbox details
reduces speed
use of a standard, compact motor
decouples the motor from the spindle

Capacitive probe mounting
non-contact
high resolution
vacuum ready
can be integrated into a small assembly
safety and practicality measurements
cable routing
levelling feet
mounting surfaces
travel locks
verification
stage alignment: both sides agains a common reference (5 DOF)
centered delta between stages